Fabrication and Characterization of Capacitive RF MEMS Perforated Switch

Fabrication and Characterization of a New MEMS Capacitive Microphone using Perforated Diaphragm

In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties of this method relies on the moveable aluminum (Al) diaphragm positioned over the backplate electrode, where the diaphragm includes a plurality of holes to allow the air in the gap between the electrode and diaphragm to escape and thus reduce acoustical damping in the microphone. Spin-on-glass (SOG) was us...

Time Characterization of Capacitive Mems Rf Switches

Design and simulation of a RF MEMS shunt capacitive switch with low actuation voltage, low loss and high isolation

According to contact type, RF MEMS switches are generally classified into two categories: Capacitive switches and Metal-to-Metal ones. The capacitive switches are capable to tolerate a higher frequency range and more power than M-to-M switches. This paper presents a cantilever shunt capacitive RF MEMS switch with characteristics such as low trigger voltage, high capacitive ratio, short switchin...

Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch

-In this paper, piezoelectric actuation is compared with electrostatic actuation for application in RF-MEMS switches with respect to actuation voltage and technological implementation. The expression for the actuation voltages of electrostatic and piezoelectric actuation are discussed and compared with respect to scaling. Calculation examples show actuation voltages for a cantilever beam of 1μm...

SPDT RF MEMS Switch U Voltage And Based On Dua Capacitive MEMS

A coplanar waveguide (CPW) single-pole double-throw (SPDT) X-band RF MEMS switch that can be actuated between states by applying a single voltage is introduced. Since a signal can be transmitted to one of the output ports without biasing, this has the potential to reduce the complexity of the required biasing network. The switch consists of a series and a shunt capacitive MEMS switch separated ...